Entegris break-through technology enables new all-plastic flaretek® sweep elbow for semiconductor market

Date: 12 July 2002
Source: Entegris

Date: 12 July 2002

Entegris, Inc. (Nasdaq: ENTG), the materials integrity management company, today unveiled its molded 90-degree Laminar Flow Sweep Elbow Fitting, made of PFA, to protect and transport high purity chemicals for the semiconductor industry.

The new product is designed to dramatically lower pressure drop and increase the flow of critical fluids used in microelectronics processes, resulting in higher efficiency and throughput for the end user. The company will showcase the product at the SEMICON West trade show later this month.

Entegris has taken its Flaretek® flare fitting platform and has incorporated a sweep feature to improve the elbow's flow capability. This new 90-degree sweep elbow fitting enables the end user to decrease turbulence and maintain even flow throughout its system. Numerical data analysis shows that the new Entegris product increases flow by 56 percent and decreases pressure drop up to 60 percent at five gallons per minute (gpm). The innovative sweep elbow is unique in its ability to achieve high-flow and reduced pressure drop with a 20 percent smaller footprint than the industry standard. This feature makes the fitting ideal to meet the market's growing demand for compact equipment and tools.

"A non-metallic 90-degree sweep elbow fitting is something the industry has needed for a long time but product suppliers didn't have the technology to deliver—until now," said Michael Wright, Entegris' chief operating officer. "Our extensive experience in microelectronics and our molding expertise enabled us to create a new technique in the design of this product. Entegris' patent-pending tooling technology helped us remove the sharp corners in a traditional elbow and optimize its outer radius. The benefit of this new design is the elimination of dead spots and a significant decrease in pressure loss. Our customers are responding very well to this product and many have already placed orders."

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